Projects

Procurement of equipment to consolidate and modernize the microsystems technology laboratory, in particular with regard to economic and ecological sustainability.
With a new modular coating system with different sputtering and evaporation sources, we can deposit a wide range of dielectrics and metals in flexible compositions over a broad spectrum of layer thicknesses in a resource-saving manner. This is complemented by a parylene (high-performance polymer) coating system for the production of insulating layers, ultra-thin diffusion barriers and mechanical protective layers. For structuring in the µm range, we will supplement our laser structuring system with a wavelength for material-selective laser ablation, and a new 5-axis micro-milling machine will be used to produce mechanical and fluidic structures in the sub-mm range, or to produce corresponding impression molds. In characterization, we will be able to supplement our modular, integrated surface profilometer with a laser Doppler vibrometer for dynamic surface measurement in the ultrasonic range. Last but not least, a new plasma furnace with reducing and oxidizing plasma is used for surface cleaning and activation, e.g. for plasma bonding.
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We aim to develop novel multistable and programmable actuators based on the combination of piezoelectric and thermal actuation. Whilst generally creating new performance and functionality compared to present piezo actuators, we address the key challenge of implementing lead-free alternatives to conventional lead-ziconate-titanate (PZT) based ceramics.

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